Reliability Checks to Consider Before Approving a Wafer Heater Design

https://precision-thermal-lab.huicopper.com/semiconductor-heater-applications-in-wafer-processing-and-testing

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result