Reliability Checks to Consider Before Approving a Wafer Heater Design

https://thermal-technology-center.inkharbory.com/posts/how-to-evaluate-thermal-uniformity-when-selecting-a-wafer-heater

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result